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PRODUCTS

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HSCV series
HSCV series
Use
Chamber Pressure Controller for Oxide and Anneal in Furnace Processes
Feature
Motor / Bellow Type Linear Motion Control Strong resistance to powder and stable control Performance compared to competitors. (<0.5hPa)
Install
SEC : 300mm FAB. (Korea / China / USA)
Hynix : 300mm FAB. (Korea / China)
China 300mm Semiconductor FAB.

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