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PRODUCTS

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LPC series
LPC series
Use
Load-Lock Chamber APC for Furnace Equipment
Feature
Real-Time Pressure Monitoring and Control with Built-In Sensor
Precise Position Control(Angle Set Resolution 0.1%)
Precise PositionControl(Pressure Set Resolution 0.1pa)
Install
SEC : 300mm FAB. (Korea / China )
Hynix : 300mm FAB. (Korea)

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